Microfabricated Systems and MEMS VI

Microfabricated Systems and MEMS VI

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COUPLED FIELD ANALYSIS In order to determine the deflection caused by the electromagnetic force generated by the coils under a constant current, a macrocode has been generated with ANSYS 5.7. The codes include large deformationanbsp;...

Title:Microfabricated Systems and MEMS VI
Author: Peter J. Hesketh
Publisher:The Electrochemical Society - 2002-01-01

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