Design of RF Circuits with Embedded Multi-physics Models of MEMS Devices

Design of RF Circuits with Embedded Multi-physics Models of MEMS Devices

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In this thesis, an accurate and efficient multi-physics based computer aided design (CAD) modeling approach using artificial neural networks (ANNs) for radio frequency micromechanical systems (RF MEMS) devices is presented. In the proposed methodology, a finite element method (FEM) analysis is performed for characterization of the selected MEMS devices in different coupled energy domains, such as electromechanical and electromagnetic-thermal-stress quantities. The FEM simulations are also utilized for the creation of training and testing sets for the ANN model. Developed ANN models are then implemented in a circuit simulator environment. Therefore, instead of using memory and time demanding full-wave analysis or even more extensive and expensive design process using multiple fabrication cycles, a simple yet accurate electronic design automation (EDA) tools compatible modeling and optimization procedure is developed. Capabilities of the proposed methodology are demonstrated with several examples featuring capacitively actuated MEMS resonating structures and coplanar waveguide (CPW) shunt MEMS switches. Simulation, design, and optimization are then performed for single MEMS devices as well as their collaborative function in an RF circuit level configuration.harmonic balance responses, etc. Therefore, the functionality of a MEMS device is represented by its ADS library element - a blackbox ANN macromodel. Examples for the device and circuit level design include the MEMS filter and F-F beamanbsp;...

Title:Design of RF Circuits with Embedded Multi-physics Models of MEMS Devices
Publisher:ProQuest - 2006

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