Introduction to Microsystem Technology

Introduction to Microsystem Technology

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A Guide for Students Gerald Gerlach, Wolfram Dotzel ... The ejected particles use the kinetic energy to move to the substrate, condense there and form a layer. ... eV) than the molecules at evaporation (0.1 eV). ... (10aˆ’2 ...10 Pa), the recipient contains the spatially extended target and the substrates with a distance of Figure 4.13 Schematic of a sputtering equipment only a few centimeters from each other.

Title:Introduction to Microsystem Technology
Author: Gerald Gerlach, Wolfram Dotzel
Publisher:John Wiley & Sons - 2008-04-30

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